Mr. Min-Ru Wu Profile

Min-Ru Wu

at National Taiwan Univ

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 9 April 2024 Poster + Paper

AI-enhanced optical critical dimension metrology for high aspect ratio structures in semiconductor advanced packaging

Fu-Sheng Yang, Min-Ru Wu, Yen-Hung Hung, Zih-Ying Fu, Liang-Chia Chen

Proceedings Volume 12956, 129560Y (2024) https://doi.org/10.1117/12.3012984

KEYWORDS: Scatterometry, Deep ultraviolet, Short wave infrared radiation, Artificial neural networks, Critical dimension metrology, Finite-difference time-domain method, Cadmium, Simulations, Scatter measurement, Reflection

Read Abstract +

Proceedings Article | 15 August 2023 Presentation + Paper

AI-guided numerical-aperture-controlled scatterometry for measurement of deep HAR and thin-film structures with a large depth variation

Zih-Ying Fu, Fu-Sheng Yang, Min-Ru Wu, Yen-Hung Hung, Liang-Chia Chen

Proceedings Volume 12618, 1261805 (2023) https://doi.org/10.1117/12.2673608

KEYWORDS: Reflectivity, Thin films, Scatterometry, Film thickness, Polarization, Artificial neural networks, Spectroscopy

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years