CONFERENCE PROCEEDINGS
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Liu Min
at Shanghai Jiao Tong Univ.
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Author
Publications (2)
SPIE Journal Paper | 25 March 2024
Study on the surface topography changes of photoresist in the design and fabrication of microlens array
Liu Dan, Wu Liying, Liu Min, Zhang Di, Qu Minni, Fu Liucheng, Cheng Xiulan
OE, Vol. 63, Issue 03, 034105, (March 2024) https://doi.org/10.1117/12.10.1117/1.OE.63.3.034105
KEYWORDS: Photoresist materials, Microlens, Quartz, Microlens array, Design, Fabrication, Spherical lenses, Optical engineering, Optical surfaces, Dry etching
Proceedings Article | 12 March 2021 Paper
A fiber-to-waveguide edge coupler assisted by silicon-nitride waveguide with large fabrication tolerance
Min Wang, Xueling Quan, Yaqian Li, Min Liu, Xiulan Cheng
Proceedings Volume 11763, 117637H (2021) https://doi.org/10.1117/12.2587450
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