In the past few years, we have fabricated nanoscale La0.7Sr0.3MnO3 periodic arrays with unique optical and magnetic
properties successfully. These periodic patterns were made by La0.7Sr0.3MnO3 resist that can be developed under a
nontoxic and environmental friendly manner using pure water. The resist is also capable to exhibit both positive and
negative resist behaviors depending on the electron beam dosage. Thus, these special characteristics are used to fabricate
and tune periodic structure thin film having controlled optical reflectance properties in the wavelength of 300 nm to 800
nm with one fixed design electron beam pattern by simply changing the electron beam dosage only. Additionally, the
magnetization of La0.7Sr0.3MnO3 patterns can be enhanced by post sintering the sample at 900 °C after electron beam
irradiation. Therefore, our study provides a one-step, simple, and convenient alternative technique for the fabrication of
tunable optical structure and nanoscale magnetic patterns, which form the building blocks for the study of optoelectronic
and magnetic devices in nanoscale periodic arrays.
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