The microscopic fringe projection profilometry system using a digital micromirror device (DMD) can improve the height sensing sensitivity by reducing the fringe pitch. However, due to the discrete nature of the DMD, it is impossible to apply arbitrary and continuous phase shifts when the fringe pitch is reduced to a few pixels. The proposed method uses a plane-parallel plate to produce a displacement on the light passing through it and achieves continuous phase shifts by controlling the oblique angle of the plate. Experimental results demonstrate that the proposed method can introduce continuous phase shifts to quasi-sinusoidal fringes with a minimum pitch of 2 pixels and correctly demodulate the phase map using a 9-step phase-shifting algorithm. Simulation and experiments also show that the inherent phase shift error can be neglected when the relevant parameters of the plate are properly selected.
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