Mr. Nan Liu Profile

Nan Liu

at Univ of Rochester

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Publications (1)

Proceedings Article | 12 October 2021 Presentation

Embedded contamination induced by etching in E-beam deposited silica: A possible precursor to laser damage

Russell Dent, Brittany Hoffman, Alexei Kozlov, Nan Liu, Amy Rigatti, Stavros Demos, Alexander Shesopalov

Proceedings Volume 11910, 1191014 (2021) https://doi.org/10.1117/12.2597975

KEYWORDS: Contamination, Reactive ion etching, Etching, Laser damage threshold, Chemical analysis, Systems modeling, Silica, Scanning electron microscopy, Polymers, Optical fabrication

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