Nan Liu
at Univ of Rochester
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 12 October 2021 Presentation
Proceedings Volume 11910, 1191014 (2021) https://doi.org/10.1117/12.2597975
KEYWORDS: Contamination, Reactive ion etching, Etching, Laser damage threshold, Chemical analysis, Systems modeling, Silica, Scanning electron microscopy, Polymers, Optical fabrication

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