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Nan Wang
at Institute of Optics and Electronics CAS
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Author
Publications (2)
Proceedings Article | 21 August 2014 Paper
Intelligent control system based on ARM for lithography tool
Changlong Chen, Xiaoping Tang, Song Hu, Nan Wang
Proceedings Volume 9283, 92830K (2014) https://doi.org/10.1117/12.2068565
KEYWORDS: Lithography, Control systems, Intelligence systems, Video, Internet, Operating systems, Electromagnetism, Human-computer interaction, Control systems design, Video processing
Proceedings Article | 23 August 2013 Paper
An algorithm for restoring the wafer surface based on B-spline surface reconstruction
Nan Wang, Wei Jiang, Wei Yan, Song Hu
Proceedings Volume 8911, 89110G (2013) https://doi.org/10.1117/12.2034199
KEYWORDS: Semiconducting wafers, Lithography, Reconstruction algorithms, Wafer-level optics, Silicon, Fuzzy logic, Integrated circuits, Optics manufacturing, Sensors, Clouds
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