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Nasir Merchant
at Zygo Corporation
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Publications (1)
Proceedings Article | 4 March 2022 Open Access Presentation + Paper
Laser damage properties of Al2O3/MgF2 antireflection coatings on large, curved substrates at 248 nm
Proceedings Volume 11982, 119820C (2022) https://doi.org/10.1117/12.2610006
KEYWORDS: Antireflective coatings, Optical coatings, Laser induced damage, Laser damage threshold, Reflectivity, Optics manufacturing, Lithography
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