Mr. Nick Ma Profile

Nick Ma

at Siemens EDA

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Author

Publications (3)

Proceedings Article | 12 June 2018 Paper

Achieve high hotspot detection accuracy by pattern scoring

Xiang Fang, Shou-Yuan Ma, Chien-Nan Lin, Hsu-Tang Liu, Chuan-Chun Lee, Chuen-Huei Yang, I-Y. Chang, Erwin Deng, Ming-Feng Shen, Min-Ying Lu, Ling-Chieh Lin, Hung-Yueh Liao, Elven Huang, Jonathan Muirhead

Proceedings Volume 10807, 108070L (2018) https://doi.org/10.1117/12.2323956

KEYWORDS: Design for manufacturing, Databases, Rule based systems, Semiconducting wafers, System identification, Visualization, Photomasks, Lutetium, Microelectronics, Design for manufacturability

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Proceedings Article | 13 July 2017 Paper

Cycle time reduction by Html report in mask checking flow

Jian-Cheng Chen, Min-Ying Lu, Xiang Fang, Ming-Feng Shen, Shou-Yuan Ma, Chuen-Huei Yang, Joe Tsai, Rachel Lee, Erwin Deng, Ling-Chieh Lin, Hung-Yueh Liao, Jenny Tsai, Amanda Bowhill, Hien Vu, Gordon Russell

Proceedings Volume 10454, 104540G (2017) https://doi.org/10.1117/12.2278691

KEYWORDS: Reticles, Databases

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Proceedings Article | 10 May 2016 Paper

Production mask composition checking flow

Shou-Yuan Ma, Chuen-Huei Yang, Joe Tsai, Alice Wang, Roger Lin, Rachel Lee, Erwin Deng, Ling-Chieh Lin, Hung-Yueh Liao, Jenny Tsai, Amanda Bowhill, Hien Vu, Gordon Russell

Proceedings Volume 9984, 99840D (2016) https://doi.org/10.1117/12.2240292

KEYWORDS: Photomasks, Semiconducting wafers, Reticles, Data conversion, Acquisition tracking and pointing, Neodymium, Radon, Databases, Visualization, Etching

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