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Niu Xiaochen
at Beijing Univ of Technology
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Publications (1)
Proceedings Article | 20 November 2014 Paper
Study of the ICP etching process on InGaAs/InP array devices
Xiaochen Niu, Jun Deng, Yanli Shi, Ying Tian, Deshu Zou
Proceedings Volume 9300, 93000Q (2014) https://doi.org/10.1117/12.2071022
KEYWORDS: Etching, Plasma, Array processing, Scanning electron microscopy, Visualization, Ions, Optoelectronics, Interfaces, Gases, Argon
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