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Pankaj Bhardwaj
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Publications (1)
Proceedings Article | 18 October 2021 Presentation + Paper
Modeling of grayscale lithography and calibration with experimental data for blazed gratings
Proceedings Volume 11875, 118750K (2021) https://doi.org/10.1117/12.2597203
KEYWORDS: Calibration, Photoresist materials, Grayscale lithography, Photomasks, Diffraction gratings, Lithography, Data modeling, Transmittance, Photoresist developing
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