Mr. Patrick Sperling Profile

Patrick Sperling

at Fraunhofer-ILT

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Publications (1)

Proceedings Article | 9 September 2019 Open Access

Novel UV line beam system for large area processing with 248 nm (Withdrawal Notice)

Matthias Trenn, Ralph Delmdahl, Patrick Sperling

Proceedings Volume 11105, 1110502 (2019) https://doi.org/10.1117/12.2529261

KEYWORDS: Excimer lasers, Ultraviolet radiation, Graphene, Oxides, Thin films, Laser applications, Electrodes, Resistance, Pulsed laser operation, Semiconducting wafers

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