Peiwen Chen
at Zhejiang Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 12 December 2018 Paper
Yuan Yao, Debin Pan, Anbing Geng, Haitao Wang, Jian Bai, Qianbo Lu, Peiwen Chen, Weidong Fang
Proceedings Volume 10848, 108480G (2018) https://doi.org/10.1117/12.2505677
KEYWORDS: Diffraction gratings, Microopto electromechanical systems, Optical design, Mirrors, Sensors, Structural sensing, Optical resonators, Interferometry, Mechanical sensors, Modal analysis

Proceedings Article | 5 November 2018 Paper
Proceedings Volume 10815, 108151H (2018) https://doi.org/10.1117/12.2502273
KEYWORDS: Adhesives, Microopto electromechanical systems, Interferometry, Finite element methods, Silicon, Packaging, Thermal effects, Microelectromechanical systems, Thermal modeling, Sensors

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