Peter Corkery
at Johns Hopkins Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 9 April 2024 Presentation + Paper
Proceedings Volume 12957, 129570H (2024) https://doi.org/10.1117/12.3010916
KEYWORDS: Etching, Electron beam lithography, Plasma etching, Lithography, Photoresist developing

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