Dr. Po-Ju Chen Profile

Dr. Po-Ju Chen

EUV Dose & System Control Design Engineer at ASML Netherlands BV

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Publications (4)

Proceedings Article | 5 March 2021 Presentation

Investigation on backplane reflectivity and dielectric mirror coating designs for improved LCoS SLM performance in telecommunication beam steering

Po-Ju Chen, Philip Engel, H. Paul Urbach

Proceedings Volume 11707, 1170706 (2021) https://doi.org/10.1117/12.2583212

KEYWORDS: Reflectivity, Liquid crystal on silicon, Dielectric mirrors, Telecommunications, Spatial light modulators, Coating, Beam steering, Diffraction gratings, Diffraction, Switches

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Proceedings Article | 25 February 2020 Paper

Finite element method for 3D optical modeling of liquid crystal on silicon spatial light modulator

Po-Ju Chen, Philip Engel, Adam Mazur, Clément Abélard, H. Paul Urbach

Proceedings Volume 11303, 1130308 (2020) https://doi.org/10.1117/12.2544783

KEYWORDS: Finite element methods, Liquid crystal on silicon, Spatial light modulators, Optical simulations, 3D modeling, Diffraction, Liquid crystals

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Proceedings Article | 1 March 2019 Presentation + Paper

Design, implementation, and study of the high-resolution high-efficiency liquid crystal on silicon spatial light modulator for the telecommunication application in the short-wave infrared spectral band

Po-Ju Chen, Philip Engel, Grigory Lazarev, Adam Mazur, H. Paul Urbach

Proceedings Volume 10941, 109410E (2019) https://doi.org/10.1117/12.2506825

KEYWORDS: Liquid crystal on silicon, Diffraction, Diffraction gratings, Reflectivity, Finite element methods, Phase shifts, Phase measurement, Telecommunications

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Proceedings Article | 12 September 2013 Paper

An electrically tunable optical zoom system with separated focusing and zooming functions

Ming-Syuan Chen, Po-Ju Chen, Yi-Hsin Lin

Proceedings Volume 8828, 88281D (2013) https://doi.org/10.1117/12.2025381

KEYWORDS: Zoom lenses, Objectives, Lenses, Liquid crystals, Optical components, Optical design, Active optics, Projection systems, Cameras, Holography

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