Ultrafast micromachining has found broad applications in a variety of scientific and industrial fields. Different materials and competing customer requirements (surface quality vs. processing speed vs. surface structure etc.) call for parameter studies prior to volume production as well as pulse parameter flexibility during operation. Up to now, often a nonoptimized point of operation for either best speed or quality had to be chosen due to limited laser source flexibility. TruMicro Series 2000 introduces true inter- and intra-process flexibility for pulse parameters such as pulse duration, pulse energy and pulse spacing up to GHz bursts. As of now, switching the pulse duration is possible within 300 fs and 20 ps in less than 600 ms without affecting beam pointing or energy stability. Therefore, intra-process pulse parameter changes allow maximization of the ablation-volume efficiency in one step and surface-quality optimization in a second, finalizing step. Additionally, inter-process pulse parameter changes enable material changes in between workpieces. In this contribution, we show how this novel flexibility for the first time leads to comprehensive and automated parameter studies that allow for next-generation process understanding and the clear selection of enhanced points of operation. We demonstrate how ablation of various materials can be increased by employing bursts on a nanosecond timescale where a simple increase in fluence would result in cone-like protrusions. Choosing the suitable timescale for energy deposition can either maximize energy efficiency of ablation or optimize ablation quality. With the TruMicro Series 2000, both optima can be combined to one efficient, high-quality process.
Within the last ten years, ultrashort pulsed lasers have developed from complex scientific devices to reliable industrial tools for various applications. MOPA systems with fiber amplifiers offer an excellent combination of small size, reliable design and flexible parameters. However, their power and more specifically pulse energy levels could not reach the high level of other laser designs based on disk or rod amplifiers.
In the latest development generation of TRUMPF’s TruMicro 2000 series, we present an all-fiber ultrashort pulse laser with a maximum pulse energy of 100 µJ based on industrial grade technologies. The high energy level allows for efficient frequency conversion to a wavelength of 515 nm which is beneficial for numerous applications.
Furthermore, the linear amplifier concept combined with intelligent electronics and software allow for flexible adaption of parameters: The laser is equipped with a sophisticated pulse-on-demand function that allows variable pulse picking from the seed frequency of 50 MHz. This bears the challenge of fluctuating pulse ensures which is overcome by a combination of measures that ensure constant pulse energies even with variable pulse distances. As a result, the laser pulses can be synchronized to external trigger signals with a time jitter as low as 30 ns.
Additionally, the TruMicro 2000 offers a flexible burst mode up to 8 pulses in one burst and the pulse duration can be changed continuously from femto- to picoseconds. With a newly patented technology, the full sweep from 300 fs to 20 ps is done in less than 500 ms without any influence on beam parameters.
In this work we present an ultrafast laser system distinguished by its industry-ready reliability and its outstanding flexibility that allows for real-time process-inherent parameter. The robust system design and linear amplifier architecture make the all-fiber series TruMicro 2000 ideally suited for passive coupling to hollow-core delivery fibers. In addition to details on the laser system itself, various application examples are shown, including welding of different glasses and ablation of silicon carbide and silicon.
The matchless properties of ultrashort laser pulses, such as the enabling of cold processing and non-linear absorption, pave the way to numerous novel applications. Ultrafast lasers arrived in the last decade at a level of reliability suitable for the industrial environment.1 Within the next years many industrial manufacturing processes in several markets will be replaced by laser-based processes due to their well-known benefits: These are non-contact wear-free processing, higher process accuracy or an increase of processing speed and often improved economic efficiency compared to conventional processes. Furthermore, new processes will arise with novel sources, addressing previously unsolved challenges. One technical requirement for these exciting new applications will be to optimize the large number of available parameters to the requirements of the application.
In this work we present an ultrafast laser system distinguished by its capability to combine high flexibility and real time process-inherent adjustments of the parameters with industry-ready reliability. This industry-ready reliability is ensured by a long experience in designing and building ultrashort-pulse lasers in combination with rigorous optimization of the mechanical construction, optical components and the entire laser head for continuous performance. By introducing a new generation of mechanical design in the last few years, TRUMPF enabled its ultrashort-laser platforms to fulfill the very demanding requirements for passively coupling high-energy single-mode radiation into a hollow-core transport fiber. The laser architecture presented here is based on the all fiber MOPA (master oscillator power amplifier) CPA (chirped pulse amplification) technology. The pulses are generated in a high repetition rate mode-locked fiber oscillator also enabling flexible pulse bursts (groups of multiple pulses) with 20 ns intra-burst pulse separation. An external acousto-optic modulator (XAOM) enables linearization and multi-level quad-loop stabilization of the output power of the laser.2 In addition to the well-established platform latest developments addressed single-pulse energies up to 50 μJ and made femtosecond pulse durations available for the TruMicro Series 2000.
Beyond these stabilization aspects this laser architecture together with other optical modules and combined with smart laser control software enables process-driven adjustments of the parameters (e. g. repetition rate, multi-pulse functionalities, pulse energy, pulse duration) by external signals, which will be presented in this work.
Multi-megawatt ultrafast laser systems at micrometer wavelength are commonly used for material processing applications, including ablation, cutting and drilling of various materials or cleaving of display glass with excellent quality. There is a need for flexible and efficient beam guidance, avoiding free space propagation of light between the laser head and the processing unit. Solid core step index fibers are only feasible for delivering laser pulses with peak powers in the kW-regime due to the optical damage threshold in bulk silica. In contrast, hollow core fibers are capable of guiding ultra-short laser pulses with orders of magnitude higher peak powers. This is possible since a micro-structured cladding confines the light within the hollow core and therefore minimizes the spatial overlap between silica and the electro-magnetic field. We report on recent results of single-mode ultra-short pulse delivery over several meters in a lowloss hollow core fiber packaged with industrial connectors. TRUMPF’s ultrafast TruMicro laser platforms equipped with advanced temperature control and precisely engineered opto-mechanical components provide excellent position and pointing stability. They are thus perfectly suited for passive coupling of ultra-short laser pulses into hollow core fibers. Neither active beam launching components nor beam trackers are necessary for a reliable beam delivery in a space and cost saving packaging. Long term tests with weeks of stable operation, excellent beam quality and an overall transmission efficiency of above 85 percent even at high average power confirm the reliability for industrial applications.
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