Richard Morse
Technical Marketing Manager
SPIE Involvement:
Author | Instructor
Publications (4)

Proceedings Article | 20 May 2006 Paper
Bo Su, Melody Ma, Abhishek Vikram, William Volk, Hong Du, Gaurav Verma, Richard Morse, Chih-wei Chu, Becky Tsao, Char Lin, Jacky Chou, Sidney Tsai
Proceedings Volume 6283, 62830Q (2006) https://doi.org/10.1117/12.681851
KEYWORDS: Optical proximity correction, Inspection, Databases, Data modeling, Defect detection, Semiconducting wafers, Lithography, Scanning electron microscopy, Reticles, Process modeling

Proceedings Article | 20 March 2006 Paper
Richard Morse, Pat LoPresti, Kevin Corbett
Proceedings Volume 6154, 61543D (2006) https://doi.org/10.1117/12.656708
KEYWORDS: Optical proximity correction, Manufacturing, Databases, Process modeling, Computer aided design, Lithography, Semiconducting wafers, Tolerancing, Photomasks, Data modeling

Proceedings Article | 2 July 2003 Paper
Proceedings Volume 5043, (2003) https://doi.org/10.1117/12.497667
KEYWORDS: Reticles, Semiconducting wafers, Photomasks, Prototyping, Manufacturing, Optical proximity correction, Resolution enhancement technologies, Data processing, Silicon, Data modeling

Proceedings Article | 11 March 2002 Paper
Proceedings Volume 4562, (2002) https://doi.org/10.1117/12.458293
KEYWORDS: Photomasks, Databases, Optical proximity correction, Resolution enhancement technologies, Semiconductors, Reticles, Semiconducting wafers, Data processing, Process engineering, Standards development

Conference Committee Involvement (6)
Photomask Technology
18 September 2007 | Monterey, California, United States
Photomask Technology
19 September 2006 | Monterey, California, United States
Photomask Technology
3 October 2005 | Monterey, California, United States
Photomask Technology
14 September 2004 | Monterey, California, United States
Photomask Technology
9 September 2003 | Monterey, California, United States
Showing 5 of 6 Conference Committees
Course Instructor
SC505: Data to Silicon: Understanding the Fundamentals of MDP, Frame Generation, RET and DFM
More than ever before, the creation and conversion of design data has become an integral part of the process of creating semiconductor chips. Historically, data preparation largely consisted of complex Boolean operations, fracturing, frame generation and job decks. The focus was on cycle time, cost and accuracy. Subwavelength manufacturing required for today's advanced technologies requires extraordinarily complex and expensive simulation-based software tools and a focus on manufacturability. These new elements require an even broader understanding of the entire process from design to lithography. Nevertheless, the process by which IC design data defined and turned into write-ready photomask manufacturing data still is not universally understood. This course will provide a basic overview of the entire design-to-silicon data flow. It will describe the fundamentals of a GDS2 design database and how this relates to the selection of manufacturing equipment, and the relationship to the final photomask and wafer images. The use of Boolean operations and other manipulations of the design data to create photomask layer data, including 'dummy-data,' OPC and PSM, will also be described. DFM will be defined and a general overview of the work being done in the DFM arena to enable high end manufacturing will be presented. In addition, more traditional back-end functions like reticle layout optimization, frame generation, job decks, and fracturing will be covered along with an overview of the use of the SEMI P-10 standard.
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