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Robert C. Anderson
at Sandia National Labs
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Author
Publications (1)
Proceedings Article | 17 May 2005 Paper
Integrated charge and position sensing for feedback control of electrostatic MEMS
Robert Anderson, Balasaheb Kawade, Kandiah Ragulan, D. H. S. Maithripala, Jordan Berg, Richard Gale, W. Dayawansa
Proceedings Volume 5765, (2005) https://doi.org/10.1117/12.600634
KEYWORDS: Electrodes, Sensors, Microelectromechanical systems, Capacitance, Capacitors, Feedback control, Nonlinear control, Device simulation, Oxides, Amplifiers
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