Mr. Roman Holly Profile

Roman Holly

at EV Group

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Publications (3)

Proceedings Article | 9 April 2024 Presentation + Paper

Maskless exposure of die annotations and image sensor patterns employing 7th generation RGB resists

K. Varga, M. Weinhart, R. Holly, T. Zenger, B. Považay, F. Bögelsack, A. Spitzer, T. Uhrmann, H. Takishita, Y. Taguchi, J. Koch, M. Schicke

Proceedings Volume 12956, 129560B (2024) https://doi.org/10.1117/12.3010156

KEYWORDS: Optical lithography, Semiconducting wafers, Distortion, RGB color model, Optical alignment, Image sensors, Semiconductors, Metals, Matrices, Sensors

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Proceedings Article | 5 October 2023 Paper

LITHOSCALE features accomplish dual exposure and high-resolution patterning

Ksenija Varga, Thomas Uhrmann, Roman Holly, Tobias Zenger, Chris Milasincic, Mel Zussman, Ron Legario, Michael Knaus

Proceedings Volume 12802, 128020B (2023) https://doi.org/10.1117/12.2675899

KEYWORDS: Dielectrics, Optical lithography, Film thickness, Advanced packaging, Lithography, Semiconducting wafers, Coating

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Proceedings Article | 25 May 2022 Presentation + Paper

Digitally driven maskless lithography optimized for fine pitch RDL and next generation devices

B. Matuskova Lednicka, T. Uhrmann, B. Považay, R. Holly, F. Bögelsack, T. Zenger, B. Thallner, J. Nakanishi, T. Nishimura

Proceedings Volume 12054, 120540B (2022) https://doi.org/10.1117/12.2608176

KEYWORDS: Scanning electron microscopy, Optical lithography, Electroplating, Packaging, Maskless lithography

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