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Ryo Kashiwagi
at Kyoto Institute of Technology
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Author
Publications (1)
Proceedings Article | 10 February 2012 Paper
Computational imaging of defects in commercial substrates for electronic and photonic devices
Masayuki Fukuzawa, Ryo Kashiwagi, Masayoshi Yamada
Proceedings Volume 8296, 829616 (2012) https://doi.org/10.1117/12.908056
KEYWORDS: Birefringence, Silicon carbide, Electronic components, Photonic devices, Optical inspection, Crystals, Inspection, Polarizers, Computational imaging, Spatial resolution
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