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Dr. Sangjin Cho
Senior Researcher at Fine Semitech Co Ltd
SPIE Involvement:
Author
Area of Expertise:
EUV Pellicle , Pellicle , EUV Lithography , Low-k dielectric
Profile Summary
2007. 2 ~ 2012. 8: Doctorate at Sungkyunkwan Univ. in Rep. of Korea (South)
PECVD, Devepment of Low-k dielectric, FT-IR analysis expert
2013. 2 ~ Current: R&D Manager at FST
EUV Pellicle Development,
Optic Pellicle Analysis
Publications (2)
Proceedings Article | 14 October 2020 Poster + Presentation + Paper
Study on the multi layers for EUV pellicle
Sang Jin Cho, Kyoungwon Seo, Kyoungsoo Kim, Lan Yu, Seong-yong Moon
Proceedings Volume 11517, 115171E (2020) https://doi.org/10.1117/12.2574586
KEYWORDS: Extreme ultraviolet, Pellicles, Atomic layer deposition, Transmittance, Semiconductors
Proceedings Article | 29 August 2019 Paper
Haze and pellicle material selection for haze free
Proceedings Volume 11177, 1117711 (2019) https://doi.org/10.1117/12.2535666
KEYWORDS: Pellicles, Lithography, Photomasks, Ions, Transmittance, Excimer lasers, Chemical analysis, Coating, Optical lithography
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