Dr. Sergio David Serulnik Profile

Dr. Sergio David Serulnik

Project Manager at Applied Materials

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Publications (2)

Proceedings Article | 29 April 2004 Paper

Automatic defect classification using topography map from SEM photometric stereo

Sergio Serulnik, Jacob Cohen, Boris Sherman, Ariel Ben-Porath

Proceedings Volume 5378, (2004) https://doi.org/10.1117/12.532961

KEYWORDS: Scanning electron microscopy, Sensors, Electrons, 3D image processing, 3D vision, Reflectivity, 3D modeling, Image segmentation, Diffusion tensor imaging, Particles

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Proceedings Article | 12 July 2002 Paper

Defect topographic maps using a non-Lambertian photometric stereo method

Sergio Serulnik

Proceedings Volume 4692, (2002) https://doi.org/10.1117/12.475658

KEYWORDS: Scanning electron microscopy, Microelectronics, Lithium, Semiconducting wafers, 3D metrology, Reflectivity, Fourier transforms, 3D image processing

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