Prof. Shiban Kishen Koul
Professor at Indian Institute of Technology Delhi
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 31 March 2006 Paper
Proceedings Volume 6172, 61721F (2006) https://doi.org/10.1117/12.659030
KEYWORDS: Antennas, Dielectrics, Silicon, Sputter deposition, Ka band, Microelectromechanical systems, Etching, Microwave radiation, Semiconducting wafers, Silicon films

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