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Prof. Shimpei Sato
at Shinshu Univ
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Author
Publications (4)
SPIE Journal Paper | 24 September 2021
Fast EUV lithography simulation using convolutional neural network
JM3, Vol. 20, Issue 04, 041202, (September 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.4.041202
KEYWORDS: Photomasks, 3D modeling, Diffraction, Polarization, Fourier transforms, Extreme ultraviolet lithography, Convolutional neural networks, Extreme ultraviolet, 3D acquisition, Waveguides
Proceedings Article | 22 February 2021 Presentation + Paper
Fast 3D lithography simulation by convolutional neural network
Proceedings Volume 11614, 116140M (2021) https://doi.org/10.1117/12.2583683
KEYWORDS: Photomasks, Convolutional neural networks, 3D modeling, Systems modeling, Lithography, Waveguides, Electromagnetic simulation, Polarization, Finite-difference time-domain method, Extreme ultraviolet
Proceedings Article | 20 September 2020 Presentation + Paper
Fast 3D lithography simulation by convolutional neural network: POC study
Proceedings Volume 11518, 115180L (2020) https://doi.org/10.1117/12.2575971
KEYWORDS: Photomasks, Convolutional neural networks, Systems modeling, Lithography, 3D modeling, Finite-difference time-domain method, Extreme ultraviolet, Optical lithography, Optical simulations, Fourier transforms
Proceedings Article | 23 March 2020 Paper
A feature selection method for weak classifier based hotspot detection
Proceedings Volume 11328, 113281E (2020) https://doi.org/10.1117/12.2559358
KEYWORDS: Feature extraction, Feature selection, Lithography, Simulation of CCA and DLA aggregates, Machine learning, Manufacturing, Computer programming, Semiconducting wafers, Design for manufacturability, Very large scale integration
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