Mr. Stefan M. Klein Profile

Stefan M. Klein

Ph.D. Student at Univ des Saarlandes

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Publications (2)

Proceedings Article | 19 May 2009 Paper

Reliability of Ag thin films sputter deposited on silicon and ceramic based substrates

A. Bittner, S. Klein, H. Seidel, U. Schmid

Proceedings Volume 7362, 73620P (2009) https://doi.org/10.1117/12.821328

KEYWORDS: Silver, Thin films, Reliability, Silicon, Ceramics, Silicon films, Modulation transfer functions, Resistance, Thin film devices, Thin film deposition

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Proceedings Article | 19 May 2009 Paper

RF MEMS switches based on an alloy of aluminum-silicon-copper

S. Klein, C. Comtesse, A. Bittner, H. Seidel, V. Ziegler, U. Prechtel, U. Schmid

Proceedings Volume 7362, 73621D (2009) https://doi.org/10.1117/12.821648

KEYWORDS: Switches, Microelectromechanical systems, Silicon, Temperature metrology, Thin films, Annealing, Semiconducting wafers, Signal attenuation, Sputter deposition, Wet etching

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