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Steffen Eckner
at Friedrich-Schiller-Univ Jena
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Publications (1)
Proceedings Article | 21 October 2005 Paper
Active shape adjustable polishing tools
C. Weber, J. Weiser, V. Galazky, V. Herold, St. Eckner
Proceedings Volume 5965, 596520 (2005) https://doi.org/10.1117/12.625548
KEYWORDS: Polishing, Surface finishing, Active optics, Lenses, Interferometers, Sensors, Abrasives, Temperature metrology, Interfaces, Reflectors
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