Mr. Sunil Srinivasan Profile

Sunil Srinivasan

Sales Representative at Oerlikon USA Inc

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Author

Publications (4)

Proceedings Article | 20 October 2006 Paper

Controlling CD uniformity for 45nm technology node applications

J. Plumhoff, S. Srinivasan, R. Westerman, D. Johnson, C. Constantine

Proceedings Volume 6349, 63490A (2006) https://doi.org/10.1117/12.686390

KEYWORDS: Etching, Photomasks, Chromium, Binary data, Critical dimension metrology, Plasma, Control systems, Ions, Lithography

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Proceedings Article | 28 June 2005 Paper

Quartz etch process for alternating aperture phase shift masks (alt-APSM)

Sunil Srinivasan, Russ Westerman, Jason Plumhoff, Dave Johnson, Chris Constantine

Proceedings Volume 5853, (2005) https://doi.org/10.1117/12.617095

KEYWORDS: Etching, Quartz, Photomasks, Phase shifts, Chromium, Chemistry, Dry etching, Plasma, Scanning electron microscopy, Photoresist processing

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Proceedings Article | 22 January 2005 Paper

Notch reduction in silicon on insulator (SOI) structures using a time division multiplex etch processes

Shouliang Lai, Sunil Srinivasan, Russell Westerman, Dave Johnson, John Nolan

Proceedings Volume 5715, (2005) https://doi.org/10.1117/12.582764

KEYWORDS: Etching, Silicon, Microelectromechanical systems, Time division multiplexing, Plasma, Semiconducting wafers, Multiplexing, High aspect ratio silicon micromachining, Oxides, Ions

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Proceedings Article | 6 December 2004 Paper

Quartz etch process to improve etch depth linearity and uniformity using Mask Etcher IV

Sunil Srinivasan, Jason Plumhoff, Russ Westerman, Dave Johnson, Chris Constantine

Proceedings Volume 5567, (2004) https://doi.org/10.1117/12.571468

KEYWORDS: Etching, Photomasks, Quartz, Scanning electron microscopy, Reactive ion etching, Phase shifts, Dry etching, Lithography, Manufacturing, Surface roughness

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