Dr. Takao Utsumi Profile

Dr. Takao Utsumi

President at Nanolith LLC

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 17 October 2014 Paper

New LEEPL technology

Takao Utsumi

Proceedings Volume 9231, 92310D (2014) https://doi.org/10.1117/12.2073508

KEYWORDS: Photomasks, Semiconducting wafers, Charged-particle lithography, Distortion, Nanoimprint lithography, Silicon, Wafer-level optics, Lithography, Gold, Overlay metrology

Read Abstract +

Proceedings Article | 16 March 2007 Paper

Shot noise effect on LER and throughput in LEEPL system

Takao Utsumi

Proceedings Volume 6517, 65172J (2007) https://doi.org/10.1117/12.717131

KEYWORDS: Charged-particle lithography, Electrons, Line edge roughness, Photomasks, Computer simulations, Diffusion, Critical dimension metrology, Statistical analysis, Extreme ultraviolet, Projection lithography

Read Abstract +

Proceedings Article | 27 June 2006 Paper

The status of LEEPL: Can it be an alternative solution?

Takao Utsumi

Proceedings Volume 6281, 628102 (2006) https://doi.org/10.1117/12.692624

KEYWORDS: Charged-particle lithography, Photomasks, Semiconducting wafers, Optical alignment, Critical dimension metrology, Lithography, Photoresist processing, Silicon, Electron beam lithography, Electrons

Read Abstract +

Proceedings Article | 25 June 1999 Paper

Low-energy e-beam proximity projection lithography

Takao Utsumi

Proceedings Volume 3676, (1999) https://doi.org/10.1117/12.351084

KEYWORDS: Photomasks, Electrons, Electron beam lithography, Semiconducting wafers, Charged-particle lithography, Projection lithography, Silicon, Lithography, Distortion, Scattering

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years