CONFERENCE PROCEEDINGS
Advanced Search
Tatiana N. Lvova
at Kazan Physical-Technical Institute
SPIE Involvement:
Author
Publications (5)
Proceedings Article | 28 May 2004 Paper
Investigation of the dynamics of recrystallization and melting of the surface of implanted silicon at rapid thermal processing
Yakh'ya Fattakhov, Mansur Galyautdinov, Tat'yana L'vova, M. Zakharov, Il'dus Khaibullin
Proceedings Volume 5401, (2004) https://doi.org/10.1117/12.557275
KEYWORDS: Silicon, Diffraction, Diffraction gratings, Ions, Semiconductors, Annealing, Ion implantation, Phosphorus, Photodiodes, Crystals
Proceedings Article | 1 August 2003 Paper
In situ investigation of local melting on the silicon surface under irradiation by incoherent light pulses with various durations
Tat'yana L'vova, Yakh'ya Fattakhov, Mansur Galyautdinov, M. Zakharov, Il'dus Khaibullin
Proceedings Volume 4948, (2003) https://doi.org/10.1117/12.516962
KEYWORDS: Silicon, Semiconductors, High speed cameras, Microscopes, Annealing, Crystals, Light sources, Semiconducting wafers, Photomicroscopy, Microelectronics
Proceedings Article | 15 November 2001 Paper
Investigation of the dynamics of phase transitions on silicon surface at light pulse heating
Yakh'ya Fattakhov, Mansur Galyautdinov, Tat'yana L'vova, M. Zakharov, Il'dus Khaibullin
Proceedings Volume 4605, (2001) https://doi.org/10.1117/12.447992
KEYWORDS: Silicon, Diffraction gratings, Semiconductors, Diffraction, High speed cameras, Ion implantation, Solids, Photomicroscopy, Microscopes, Solid state electronics
Proceedings Article | 17 April 2001 Paper
Phase transition dynamics on semiconductor surface at light pulse irradiation
Yakh'ya Fattakhov, Mansur Galyautdinov, Tat'yana L'vova, Il'dus Khaibullin
Proceedings Volume 4183, (2001) https://doi.org/10.1117/12.424321
KEYWORDS: Silicon, Diffraction gratings, Diffraction, Semiconductors, High speed cameras, Solid state electronics, Ion implantation, Microscopes, Liquids, Crystals
Proceedings Article | 13 September 1996 Paper
Dynamics of recrystallization and melting of implanted silicon at irradiation by powerful light pulses
Yakh'ya Fattakhov, Mansur Galyautdinov, Tat'yana L'vova, Il'dus Khaibullin
Proceedings Volume 2876, (1996) https://doi.org/10.1117/12.250917
KEYWORDS: Silicon, Semiconductors, Semiconductor lasers, Lamps, Liquids, Semiconducting wafers, Radon, Reflection, Annealing, Laser irradiation
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top