Dr. Thi Thu Huong Chu Profile

Dr. Thi Thu Huong Chu

at The Univ. of Texas at Dallas

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 9 April 2024 Presentation + Paper

Understanding the stability of advanced inorganic-organic hybrid thin films for advanced resist applications

Dan Le, Thi Thu Huong Chu, Jin-Hyun Kim, Jean-Francois Veyan, Won-Il Lee, Nikhil Tiwale, Minjong Lee, Seungsoo Choi, Jihoon Woo, Chang-Yong Nam, Rino Choi, Jiyoung Kim

Proceedings Volume 12957, 129570B (2024) https://doi.org/10.1117/12.3010970

KEYWORDS: Thin films, Film thickness, X-ray photoelectron spectroscopy, Atomic layer deposition, Chemical analysis, Aluminum, Carbon monoxide, Materials science, Extreme ultraviolet lithography, Engineering

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years