Dr. Thomas J. Huisman Profile

Dr. Thomas J. Huisman

SPIE Involvement:

Author

Publications (7)

SPIE Journal Paper | 28 April 2023 Open Access

Training procedure for scanning electron microscope 3D surface reconstruction using unsupervised domain adaptation with simulated data

Tim Houben, Thomas Huisman, Maxim Pisarenco, Fons van der Sommen, Peter de With

JM3, Vol. 22, Issue 03, 031208, (April 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.3.031208

KEYWORDS: Scanning electron microscopy, Education and training, Semiconducting wafers, Electron microscopes, 3D scanning, Data modeling, Critical dimension metrology, Scatterometry, 3D metrology, 3D modeling

Read Abstract +

DOWNLOAD PAPER

Proceedings Article | 27 April 2023 Poster + Presentation + Paper

Depth estimation from SEM images using deep learning and angular data diversity

Tim Houben, Maxim Pisarenco, Thomas Huisman, Hans Onvlee, Fons van der Sommen, Peter de With

Proceedings Volume 12496, 124961E (2023) https://doi.org/10.1117/12.2658094

KEYWORDS: Scanning electron microscopy, Line scan image sensors, Education and training, Simulations, Analytic models, Monte Carlo methods, Electron beams, Neural networks, Image analysis, Silicon

Read Abstract +

Proceedings Article | 5 March 2022 Paper

Depth estimation from a single CD-SEM image using domain adaptation with multimodal data

Tim Houben, Thomas Huisman, Maxim Pisarenco, Fons van der Sommen, Peter de With

Proceedings Volume 12084, 120841I (2022) https://doi.org/10.1117/12.2622635

KEYWORDS: Data modeling, 3D modeling, Semiconducting wafers, Monte Carlo methods, Neural networks, Metrology, Semiconductors, Scanning electron microscopy, 3D metrology, Sensors

Read Abstract +

SPIE Journal Paper | 12 September 2020

Understanding the influence of three-dimensional sidewall roughness on observed line-edge roughness in scanning electron microscopy images

Luc Van Kessel, Thomas Huisman, Cornelis Hagen

JM3, Vol. 19, Issue 03, 034002, (September 2020) https://doi.org/10.1117/12.10.1117/1.JMM.19.3.034002

Read Abstract +

Proceedings Article | 20 March 2020 Presentation + Paper

Understanding the influence of 3D sidewall roughness on observed line-edge roughness in scanning electron microscopy images

L. van Kessel, T. Huisman, C. Hagen

Proceedings Volume 11325, 113250Z (2020) https://doi.org/10.1117/12.2550240

KEYWORDS: Scanning electron microscopy, Line edge roughness, Monte Carlo methods, 3D modeling, Scattering, Electron beams, Metrology

Read Abstract +

Proceedings Article | 26 March 2019 Paper

Analyze line roughness sources using power spectral density (PSD)

Lingling Pu, Teng Wang, Thomas Huisman, Ruben Maas, Maikel Goosen, Harm Dillen, Philippe Leray, Wei Fang

Proceedings Volume 10959, 109592W (2019) https://doi.org/10.1117/12.2516570

KEYWORDS: Scanning electron microscopy, Line edge roughness, Semiconducting wafers, Monte Carlo methods, Image segmentation, Semiconductors, Extreme ultraviolet, Optical simulations, Solids, Metrology

Read Abstract +

Proceedings Article | 4 November 2016 Presentation

THz spectroscopy for THz spintronics (Conference Presentation)

Thomas Huisman

Proceedings Volume 9931, 99311I (2016) https://doi.org/10.1117/12.2235682

KEYWORDS: Ferromagnetics, Heterojunctions, Femtosecond phenomena, Ultrafast phenomena, Terahertz spectroscopy, Emission spectroscopy, Spintronics, Ultrafast laser spectroscopy, Terahertz radiation, Spectroscopy

Read Abstract +

Showing 5 of 7 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years