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Dr. Thomas P. Swiler
at Sandia National Labs
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Publications (1)
Proceedings Article | 14 February 2008 Paper
Challenges of designing and processing extreme low-G microelectromechanical system (MEMS) accelerometers
Thomas Swiler, Uma Krishnamoorthy, Peggy Clews, Michael Baker, Danelle Tanner
Proceedings Volume 6884, 68840O (2008) https://doi.org/10.1117/12.778244
KEYWORDS: Semiconducting wafers, Packaging, Sensors, Microelectromechanical systems, Silicon, Silica, Epoxies, Switches, Chemical elements, Deep reactive ion etching
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