Mr. Tiapeng Guan Profile

Tiapeng Guan

at Shanghai Huali Microelectronics Corp

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Publications (1)

Proceedings Article | 20 March 2019 Paper

Critical defect detection, monitoring and fix through process integration engineering by using D2DB pattern monitor solution

Ming Tian, Yu Zhang, Tiapeng Guan, Jianghua Leng, Baojun Zhao, Lei Yan, Wei Hua, Abhishek Vikram, Guojie Chen, Hui Wang, Gary Zhang, Wenkui Liao

Proceedings Volume 10962, 109620L (2019) https://doi.org/10.1117/12.2511672

KEYWORDS: Scanning electron microscopy, Semiconducting wafers, Optical lithography, Defect detection, Etching, Process control, Image processing, Process engineering, Wafer inspection, Chemical mechanical planarization

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