Mr. Tobias T. Beutel Profile

Tobias T. Beutel

at Technische Univ Braunschweig

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Proceedings Article | 17 May 2013 Paper

Flexible hot-film anemometer arrays for flow measurements on curved structures

T. Beutel, M. Schwerter, M. Leester-Schädel, A. Dietzel, S. Büttgenbach

Proceedings Volume 8763, 87630N (2013) https://doi.org/10.1117/12.2016755

KEYWORDS: Sensors, Resistance, Nickel, Aerodynamics, Metals, Copper, Glasses, Temperature metrology, Aluminum, Gold

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In this paper, a set of flexible aeroMEMS sensor arrays for flow measurements in boundary layers is presented. The sensor principle of these anemometers is based on convective heat transfer from a hot-film into the fluid. All sensors consist of a nickel sensing element and copper tracks. The functional layers are attached either on a ready-made polyimide foil or on a spin-on polyimide layer. These variants are necessary to meet the varying requirements of measurements in different environments. Spin-on technology enables the use of very thin PI layers, being ideal for measurements in transient flows. It is a unique characteristic of the presented arrays that their total thickness can be scaled from 5 to 52 μm. This is essential, because the maximum sensor thickness has to be adapted to the various thicknesses of the boundary layers in different flow experiments. With these sensors we meet the special requirements of a wide range of fluid mechanics. For less critical flow conditions with much thicker boundary layers, thicker sensors might be sufficient and cheaper, so that ready-made foils are perfect for these applications. Since the presented sensors are flexible, they can be attached on curved aerodynamic structures without any geometric mismatches. The entire development, starting from theoretical investigations is described. Further, the micro-fabrication is explained, including all typical processes e.g. photolithography, sputtering and wet-etching. The wet-etching of the sensing element is described precisely, because the resulting final dimensions are critical for the functional characteristics.

Proceedings Article | 5 May 2011 Paper

Robust pressure sensor for measurements in boundary layers of liquid fluids with medium total pressures

T. Beutel, N. Ferreira, M. Leester-Schädel, S. Büttgenbach

Proceedings Volume 8066, 80661U (2011) https://doi.org/10.1117/12.885610

KEYWORDS: Sensors, Semiconducting wafers, Silicon, Fluid dynamics, Glasses, Actuators, Data acquisition, Amplifiers, Microfluidics, Etching

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In this work, the latest results of the design, fabrication and characterization of a new MEMS piezoresistive pressure sensor are presented. It is made of silicon using a boron diffusion process to create piezoresistors. Significant changes in the layout as well as in the micro-fabrication process have been made, e.g. anodic bonding of a Pyrex cover on the backside. These lead to a very precise pressure sensor, which is tailor made for high dynamic measurements in fluids with a total pressure up to 4 bar. This new piezoresistive pressure sensor has been developed in order to meet the special requirements of measurements in fluid mechanics, particularly with regard to the non-intrusive nature of the sensor. The sensor development, starting with the simulation of mechanical stresses within the diaphragm is described. These calculations have lead to an optimized placement of the piezoresistors in order to achieve a maximum sensitivity. The result of this work is a sensor which has well known properties. Important parameters including sensitivity, resonance frequency and maximum load are described precisely. These are necessary to enable new measurements in the boundary layer of fluids. The experiments and the initial results, e.g. its linearity and its dynamic capability are demonstrated in several figures.

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