Dr. Tohru Mogami Profile

Dr. Tohru Mogami

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Proceedings Article | 25 May 2010 Paper

Perspectives of CMOS technology and future requirements

Tohru Mogami

Proceedings Volume 7748, 774802 (2010) https://doi.org/10.1117/12.864085

KEYWORDS: Copper, Transistors, Lithography, Reliability, Control systems, Process control, CMOS technology, Etching, Field effect transistors, Line edge roughness

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In Si-LSI industry, the variation of device characteristics has been one of the issues because of 10-year-lifetime LSI and high-yield mass production, and it has been continuously developing the several methods to mitigate and straighten out it. Currently, the local and random variation has been still the critical issue, compared to the global variation and the systematic one, because devices are so scaled down and the packing-density of devices is very high in LSI's. In FEOL, this variation leads to the performance degradation of SRAM, which consists of six transistors in small cells and works as the main memory on chip. This is because the local and random variation can cause the mismatch of pair transistors. In BEOL, the variation causes the degradation of interconnect performance and reliability, and leads to the performance degradation of many circuits. It is suggested that the main mechanism in that variation can be line edge roughness (LER) and random dopant fluctuation (RDF). Both LER and RDF are related to a lot of process technologies, such as lithography, etching, annealing and so on. In order to analyze the relationship between this variation and process technology and to reduce the variation, we should develop the new analysis methods for variations in <50nm CMOS devices and the new control methods. This paper presents the current status of variations and variation mechanisms, and discusses future requirements for the advanced CMOS-LSI.

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