In this study, the preparation of giant magnetostrictive Tb-Fe thin films by ion plating process was investigated to induce high magnetostrictive susceptibility and high magnetostriction, especially in respect to the effects of incidence of the vapor flux by geometrical arrangement of the tilted substrate. With increasing substrate angle of Tb-Fe films, the in-plane magnetization at 15 kOe was strongly increased. This indicates that the easy direction of magnetization of Tb-Fe film changed from perpendicular to in-plane by obliquely deposition. The magnetic and magnetostrictive characteristics of the obliquely deposited Tb-Fe films were affected by an oblique anisotropy. The oblique anisotropy of Tb-Fe film may be induced by the shape anisotropy connected with columnar grain.
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