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Dr. Tuhin Ghosh
at Canatu Oy
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Publications (1)
Proceedings Article | 21 November 2023 Presentation + Paper
Carbon nanotube membranes for EUV photolithography: a versatile material platform
Jarkko Etula, Ahmed Soliman, Tuhin Ghosh, Bjørn Mikladal, Emma Salmi, Emile Van Veldhoven, Kirill Chernenko, Ilkka Varjos, Taneli Juntunen
Proceedings Volume 12750, 127500M (2023) https://doi.org/10.1117/12.2686790
KEYWORDS: Extreme ultraviolet, Carbon nanotubes, Optical lithography, Pellicles, X-ray photoelectron spectroscopy, Transparency, Transmission electron microscopy, Surface chemistry, Scanning electron microscopy, FT-IR spectroscopy
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