Dr. Ulrich C. Boettiger Profile

Dr. Ulrich C. Boettiger

R&D Director

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Publications (3)

Proceedings Article | 18 September 2018 Paper

Multi-color anti-reflection coating with silicon micro-lens photodiode for image sensor

Han Li, Stan Micinski, Nirav Dharia, Ulrich Boettiger

Proceedings Volume 10729, 107290I (2018) https://doi.org/10.1117/12.2319624

KEYWORDS: Silicon, Image sensors, Quantum efficiency, RGB color model, Photodiodes, Reflection, Antireflective coatings, Visible radiation, Sensors, Geometrical optics

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Proceedings Article | 25 April 2008 Paper

Small pixel development for novel CMOS image sensors

G. Agranov, J. Ladd, T. Gilton, R. Mauritzson, U. Boettiger, X. Fan, X. Li

Proceedings Volume 7001, 700108 (2008) https://doi.org/10.1117/12.781606

KEYWORDS: Signal to noise ratio, Image quality, Transistors, High dynamic range imaging, Quantum efficiency, Image sensors, Image processing, Photodiodes, CMOS sensors, Diffusion

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Proceedings Article | 17 May 1994 Paper

Aerial image analysis of quarter-micrometer patterns on a 0.5-NA excimer stepper

Ulrich Boettiger, Thomas Fischer, Andreas Grassmann, Holger Moritz

Proceedings Volume 2197, (1994) https://doi.org/10.1117/12.175434

KEYWORDS: Photomasks, Semiconducting wafers, Deep ultraviolet, Reflectivity, Image analysis, Excimers, Image processing, Glasses, Excimer lasers, Lithography

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