Mr. Weider Tang Profile

Weider Tang

at National Tsing Hua Univ

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Author

Publications (2)

SPIE Journal Paper | 1 April 2003

Novel multi-user-MEMS-processes-compatible single-layer out-of-plane electrothermal actuator

Weider Tang, Mingching Wu, Weileun Fang

JM3, Vol. 2, Issue 02, (April 2003) https://doi.org/10.1117/12.10.1117/1.1564595

KEYWORDS: Actuators, Microelectromechanical systems, Thin films, Low pressure chemical vapor deposition, Finite element methods, Oxides, Interferometers, Microactuators, Thin film devices, Interfaces

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Proceedings Article | 14 November 2002 Paper

A Novel MUMPs-compatible single-layer out-of-plane electrothermal actuator

Weider Tang, Mingching Wu, Yi-Ping Ho, Mau-Shium Yeh, Weileun Fang

Proceedings Volume 4935, (2002) https://doi.org/10.1117/12.469088

KEYWORDS: Actuators, Microelectromechanical systems, Microactuators, Thin films, Oxides, Optical simulations, Finite element methods, Low pressure chemical vapor deposition, Interferometers, Fabry–Perot interferometers

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