Dr. Wenbin Wang Profile

Dr. Wenbin Wang

at Beijing Institute of Technology

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 21 December 2022 Presentation

Freeform surface measurement by virtual differential confocal based on reference planes monitoring

Wenbin Wang, Lirong Qiu, Weiqian Zhao

Proceedings Volume 12319, 123190A (2022) https://doi.org/10.1117/12.2656177

KEYWORDS: Confocal microscopy, Data modeling, 3D modeling, Signal processing, Precision measurement, Clouds, 3D metrology, Surface roughness, Sensors, Photovoltaics

Read Abstract +

Aiming at high-precision measurement of freeform surface, a method combing virtual differential confocal and reference planes monitoring is proposed. By setting the window of the CCD and selecting two acquisition areas of different sizes, the large area is used for coarse observation of the light spot when looking for the focus, and the small area is used as perform high-speed synchronous acquisition of the light intensity of the front focus and back focus. The intensity signals of the front focus and back focus are processed by normalized differential subtraction, to obtain the anti-scattering differential confocal curve. 3D point cloud data is obtained by measuring the freeform surface, and an error monitoring and compensation model is established based on standard planes to compensate 3D motion errors in point cloud data, to achieve the high precision freeform surface measurement. Theoretical analysis and experimental verification show that the axial resolution is 2 nm, the maximum measurable inclination angle of two dimensions are both 25°, and the standard deviation of measurement repeatability of 10 times PV values is 10 nm. This method can effectively expand the observation range of the differential confocal sensor, reduce the difficulty of the radial adjustment of the pinhole, and provide a new idea for high-precision measurement of freeform surface with large inclination angles and different surface roughness.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years