Mr. Wilson Hsu Profile

Wilson Hsu

at Micron Technology Taiwan Inc

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Publications (2)

Proceedings Article | 2 April 2014 Paper

Integrated ADI optical metrology solution for lithography process control of CD and OV

Platt Hung, David Huang, Noelle Wright, Vincent Couraudon, Bijoy Rajasekharan, Reinder Plug, Hugo Cramer, Marlene Strobl, Wilhelm Tsai, Andy Lan, Tom Chen, Wilson Hsu, Henry Chen, Frida Liang, Alan Wang, Ethan Chiu, Paul Yu, Yi Song, Sylvia Yuan, Remco Dirks, Mariya Ponomarenko, Baukje Wisse, Stefan Kruijswijk, Henk Niesing

Proceedings Volume 9050, 90501J (2014) https://doi.org/10.1117/12.2047205

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Metrology, Overlay metrology, Lithography, Process control, Scanners, Time metrology, Lithium, Optical metrology

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Proceedings Article | 12 December 2009 Paper

Overlay improvement by ASML HOWA 5th alignment strategy

Richer Yang, Todd Shih, CY Chiang, Raf Wang, Wythe Lin, Jackie Chen, Jonathan Chiu, Wilson Hsu

Proceedings Volume 7520, 752023 (2009) https://doi.org/10.1117/12.839816

KEYWORDS: Semiconducting wafers, Optical alignment, Distortion, Overlay metrology, Front end of line, Lithography, Scanners, Capacitance, Current controlled current source, Yield improvement

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