Mr. Wing Kwan Ho Profile

Wing Kwan Ho

at Taiwan Semiconductor Manufacturing Co Ltd

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 26 November 2024 Presentation + Paper

Ta Wei Ou, Wing Kwan Ho, Tung San Lai, Jeremy L. Lu, Alan C. Chen, Alexander Egl, Matthias Kühmayer, Florian Brenner

Proceedings Volume 13216, 132160F (2024) https://doi.org/10.1117/12.3034678

KEYWORDS: Mask making, Thermal effects, Matrices, Machine learning, Design, Beam controllers, Advanced patterning

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Keywords/Phrases