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Wonbin Choi
at SMTech Co Ltd
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 20 November 2024 Poster + Paper
Testing plan of NA 0.8 deep UV objective system for semiconductor defect inspection
Yunjong Kim, Jihun Kim, JaeHee Byun, HanRim Chae, KyoungSang Moon, Minkyu Jung, Wonbin Choi, Ingu Chang, Hyun-il Cho
Proceedings Volume 13216, 132162C (2024) https://doi.org/10.1117/12.3037799
KEYWORDS: Deep ultraviolet, Objectives, Lenses, Mirrors, Semiconductors, Optical alignment, Combined lens-mirror systems, Optical fabrication, Defect inspection, Optical design
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