Xiangxiang Song
at Univ. of Science and Technology of China
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 23 January 2023 Paper
Proceedings Volume 12556, 1255602 (2023) https://doi.org/10.1117/12.2642575
KEYWORDS: Graphene, Resonators, Silicon, Ions, Gallium, Ion beam lithography, Electrodes, Oxides, Nanolithography, Ion beams

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