Xiangyu Zhu
at Shanghai Institute of Optics and Fine Mechanics
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 23 December 2023 Paper
Proceedings Volume 12982, 129820U (2023) https://doi.org/10.1117/12.3018263
KEYWORDS: Multilayers, Monte Carlo methods, Extreme ultraviolet, Absorption, Light absorption, Film thickness, Silicon, Femtosecond phenomena, Laser induced damage, Reflection

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