Prof. Xiao Qiang Peng
at National University of Defense Technology
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 18 December 2019 Paper
Proceedings Volume 11341, 113411R (2019) https://doi.org/10.1117/12.2547713
KEYWORDS: Polishing, Surface finishing, Mirrors, Aluminum, Optical components, Aspheric lenses

Proceedings Article | 18 December 2019 Paper
Proceedings Volume 11341, 1134116 (2019) https://doi.org/10.1117/12.2543939
KEYWORDS: Polishing, Mirrors, Surface finishing, Aluminum, Chemical mechanical planarization, Abrasives, Particles, Surface roughness, Mathematical modeling, Oxides

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