Dr. Xiao Deng Profile

Dr. Xiao Deng

Doctoral Candidate at Tongji Univ

SPIE Involvement:

Author

Publications (8)

Proceedings Article | 4 December 2020 Paper

Paper

The effects of thermocompression bonding on Si/ SiO2 multilayer thin-film based critical dimension structures

Yanni Cai, Xiao Deng, Xinpan Wang, Feng Yang

Proceedings Volume 11617, 116172Q (2020) https://doi.org/10.1117/12.2585375

KEYWORDS: Adhesives, Semiconducting wafers, Atomic force microscopy, Wafer bonding, Thin films, Scanning electron microscopy

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Proceedings Article | 4 December 2020 Paper

Paper

Self-traceable nano-grating frequency doubling based on polarization gradient light field

Xinpan Wang, Xiao Deng, Yanni Cai, Feng Yang

Proceedings Volume 11617, 116172P (2020) https://doi.org/10.1117/12.2585373

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Proceedings Article | 4 December 2020 Paper

Paper

Optimization of line edge roughness before and after etching with photoresist in soft x-ray interference lithography

Zhaohui Tang, Xiao Deng, Yanni Cai, Xinpan Wang, Feng Yang

Proceedings Volume 11617, 116172N (2020) https://doi.org/10.1117/12.2585364

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Proceedings Article | 4 December 2020 Paper

Paper

A new method to calibrate an atomic force microscope with the self-traceable chromium grating fabricated by atomic lithography

Zhenjie Gu, Xiao Deng, Yanni Cai, Xinpan Wang, Feng Yang

Proceedings Volume 11617, 1161736 (2020) https://doi.org/10.1117/12.2585428

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Proceedings Article | 4 December 2020 Paper

Paper

Study on diffraction efficiency of Cr nanograting prepared by laser-focused atomic deposition

Jie Liu, Xiao Deng, Yanni Cai, Xinpan Wang, Feng Yang

Proceedings Volume 11617, 116171A (2020) https://doi.org/10.1117/12.2585096

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SPIE Journal Paper | 5 December 2018

Process optimization of selective wet etching for fabrication of high-aspect-ratio and uniform multilayer grating reference materials

Longfei Zhang, Xingrui Wang, Xinbin Cheng, Xiao Deng

JM3, Vol. 17, Issue 04, 044003, (December 2018) https://doi.org/10.1117/12.10.1117/1.JMM.17.4.044003

KEYWORDS: Etching, Multilayers, Wet etching, Ultrasonics, Signal processing, Line edge roughness, Scanning electron microscopy, Transmission electron microscopy, Calibration, Reactive ion etching

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Proceedings Article | 15 September 2016 Presentation + Paper

Presentation + Paper

Characterization of one-dimensional gratings fabricated by laser-focused atomic deposition

Jie Liu, Xinbin Cheng, Jie Chen, Xingrui Wang, Xiao Deng, Yan Ma, Tongbao Li

Proceedings Volume 9927, 99270K (2016) https://doi.org/10.1117/12.2235906

KEYWORDS: Metrology, Chromium, Atomic force microscopy, Calibration, Chemical species, Laser stabilization, Scanning electron microscopy, Standards development, Manufacturing, Atomic force microscope

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Proceedings Article | 24 September 2015 Paper

Paper

Replication and subdivision of chromium nano-grating in atom lithography

Xiao Deng, Jie Chen, Jie Liu, Yan Ma, Xinbin Cheng, Tongbao Li

Proceedings Volume 9628, 96281O (2015) https://doi.org/10.1117/12.2191128

KEYWORDS: Chromium, Atomic force microscopy, Chemical species, Lithography, Nanolithography, Nanostructures, Metrology, Nanofabrication, Standards development, Image analysis

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Showing 5 of 8 publications

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