Dr. Xiaolei Li Profile

Dr. Xiaolei Li

Senior Director at PDF Solutions Inc

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Author

Publications (4)

Proceedings Article | 29 June 1998 Paper

Chip-scale 3D topography synthesis

Andrzej Strojwas, Xiaolei Li, Wojciech Maly, Mariusz Niewczas

Proceedings Volume 3334, (1998) https://doi.org/10.1117/12.310811

KEYWORDS: Photomasks, Databases, Lithography, Distance measurement, 3D modeling, Optical proximity correction, Photoresist materials, Transistors, Manufacturing, Deep ultraviolet

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Proceedings Article | 29 June 1998 Paper

Metropole-3D: a rigorous 3D topography simulator

Aaron Swecker, Xiaolei Li, Kevin Lucas, Andrzej Strojwas

Proceedings Volume 3334, (1998) https://doi.org/10.1117/12.310805

KEYWORDS: 3D modeling, Photoresist materials, Fused deposition modeling, Metals, Photoresist developing, Reflectivity, Lithography, Photomasks, Waveguides, Computer simulations

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Proceedings Article | 11 September 1997 Paper

Modeling of defect propagation/growth for yield impact prediction in VLSI manufacturing

Linda Milor, Mahesh Reddy, YungTao Lin, Aaron Swecker, Andrzej Strojwas, Xiaolei Li

Proceedings Volume 3216, (1997) https://doi.org/10.1117/12.284699

KEYWORDS: Particles, Photoresist materials, Aluminum, Etching, Tungsten, Contamination, Photoresist developing, Manufacturing, 3D modeling, Semiconducting wafers

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Proceedings Article | 7 July 1997 Paper

Application of rigorous topography simulation for modeling of defect propagation/growth in VLSI fabrication

YungTao Lin, Linda Milor, Mahesh Reddy, Xiaolei Li, Andrzej Strojwas

Proceedings Volume 3050, (1997) https://doi.org/10.1117/12.275924

KEYWORDS: Particles, Aluminum, Contamination, Photoresist materials, Etching, Tungsten, Photoresist developing, Scanning electron microscopy, Inspection, Very large scale integration

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