The bound state in the continuum (BIC) is widely used in optical field confinement because of its potential in radiation suppression, providing an energy confinement method different from traditional microcavities. However, the size compression of BIC cavities still remains challenging. In this paper, we report an ultra-small size, high-Q BIC microcavity on silicon on insulator (SOI) platfom. We used the integer topological charges carried by the BICs to suppress the vertical radiation loss, while photonic crystal hetero-structures were utilized to reduce the transverse energy leakage. We designed and fabricated photonic crystal microcavity with optical confinement region as tiny as 5×5 period. The measured Q is greater than 170 thousand with the peak wavelength at 1550.39 nm. This work shows the potential of BIC microcavities in size compression. The study has positive effects on integrated optics, information optics, biooptics, topological optics and nonlinear optics.
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