CONFERENCE PROCEEDINGS
Advanced Search
Xunchang Ma
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 11 October 2024 Paper
Optimization method of scanning strategy for reactive ion beam etching of large aperture grating elements
Proceedings Volume 13278, 1327802 (2024) https://doi.org/10.1117/12.3032015
KEYWORDS: Etching, Convolution, Reactive ion etching, Ion beams, Diffraction gratings, Optical gratings, Defense technologies, Blazed gratings, 3D modeling, Superposition
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top