Dr. Ya-Ching Hou Profile

Dr. Ya-Ching Hou

at IM Flash Technologies LLC

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 18 March 2015 Paper

Impact of bandwidth on contrast sensitive structures for low k1 lithography

Will Conley, Simon Hsieh, Paolo Alagna, Yaching Hou, Pedro Martinez

Proceedings Volume 9426, 942607 (2015) https://doi.org/10.1117/12.2085826

KEYWORDS: Critical dimension metrology, Semiconducting wafers, Scanners, Lithography, Control systems, Yield improvement, Optical proximity correction, Overlay metrology, Process control, Metals

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SPIE Journal Paper | 1 July 2007

Lithography-simulation-based design for manufacturability rule development: an integrated circuit design house's approach

Jonathan Ho, Yan Wang, Joanne Wu, Ya-Ching Hou, Ke-Chih Wu

JM3, Vol. 6, Issue 03, 031008, (July 2007) https://doi.org/10.1117/12.10.1117/1.2781584

KEYWORDS: Optical proximity correction, Design for manufacturability, Lithography, Design for manufacturing, Metals, Scanning electron microscopy, Semiconducting wafers, Holmium, Calibration, Integrated circuit design

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Proceedings Article | 27 March 2007 Paper

Feasibility Study of 45nm Metal Patterning with 0.93 NA

Yung Feng Cheng, Yueh Lin Chou, Ya Ching Hou, Bo Jou Lu, Chuen Huei Yang

Proceedings Volume 6520, 65204J (2007) https://doi.org/10.1117/12.711367

KEYWORDS: Polarization, Metals, Resolution enhancement technologies, Printing, Semiconducting wafers, Logic, Image processing, Optical lithography, Line width roughness, Image resolution

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Proceedings Article | 14 March 2006 Paper

DFM: a practical layout optimization procedure for the improved process window for an existing 90-nm product

Jonathan Ho, Yan Wang, Ya-Ching Hou, Benjamin Szu-Min Lin, Chun Chi Yu, Kechih Wu, Cliff Ma

Proceedings Volume 6156, 61560C (2006) https://doi.org/10.1117/12.656085

KEYWORDS: Design for manufacturing, Optics manufacturing, Optical simulations, Optical proximity correction, Critical dimension metrology, Field programmable gate arrays, Metals, Scanning electron microscopy, Diffraction, Microelectronics

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